A Novel Micro- and Nano-Scale Positioning Sensor Based on Radio Frequency Resonant Cavities
نویسندگان
چکیده
منابع مشابه
A Novel Micro- and Nano-Scale Positioning Sensor Based on Radio Frequency Resonant Cavities
In many micro- and nano-scale technological applications high sensitivity displacement sensors are needed, especially in ultraprecision metrology and manufacturing. In this work a new way of sensing displacement based on radio frequency resonant cavities is presented and experimentally demonstrated using a first laboratory prototype. The principle of operation of the new transducer is summarize...
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ژورنال
عنوان ژورنال: Sensors
سال: 2014
ISSN: 1424-8220
DOI: 10.3390/s140609615